- surface anisotropic etching
- Техника: поверхностное анизотропное травление
Универсальный англо-русский словарь. Академик.ру. 2011.
surface anisotropic etching
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Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… … Wikipedia
Reactive-ion etching — (RIE) is an etching technology used in microfabrication. It uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High energy ions from the plasma… … Wikipedia
Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Anisotropy — (pronounced with stress on the third syllable, IPAEng|ˌænaɪˈsɒtrəpi) is the property of being directionally dependent, as opposed to isotropy, which means homogeneity in all directions. It can be defined as a difference in a physical property… … Wikipedia
Nanoarchitectures for lithium-ion batteries — Efforts in lithium ion batteries research have been to improve two distinct characteristics: capacity and rate. The capacity of the battery to store energy can be improved through the ability to insert/extract more lithium ions from the electrode … Wikipedia
Nano and Micro Devices Center — Established 2008 Type Research Center Chairman Robert Lindquist … Wikipedia
Nerve guidance conduit — A nerve guidance conduit (also referred to as an artificial nerve conduit or artificial nerve graft, as opposed to an autograft) is an artificial means of guiding axonal regrowth to facilitate nerve regeneration and is one of several clinical… … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Bulk micromachining — is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively… … Wikipedia
